Library-based process test vehicle design framework

被引:1
作者
Doong, KYY [1 ]
Hung, LJ [1 ]
Ho, S [1 ]
Young, KL [1 ]
Lin, SC [1 ]
机构
[1] Taiwan Semicond Mfg Corp, Shinchu 300, Taiwan
来源
DESIGN AND PROCESS INTEGRATION FOR MICROELECTRONIC MANUFACTURING | 2003年
关键词
test structure; test vehicle; logic process; SoC; electronic design automation; synthesis; migration;
D O I
10.1117/12.485264
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This work describes a test vehicle design framework, which minimizes the discrepancy among design rule set, test structure design and testing plan. The framework is composed of the symbolic design rule set, Parameterized-Device, test structure generator, and test vehicle generator. An approach for simplification and consolidation of test structure is proposed to derive the concise test structure library. Finally, implementation of test vehicle is presented.
引用
收藏
页码:188 / 196
页数:9
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