Uncertainty evaluation of a 300-mm-aperture vertical Fizeau interferometer

被引：0

作者：

Wang, Yuntao ^{[1
]}

Chen, Lei ^{[1
]}

Hu, Chenhui ^{[1
]}

Zheng, Donghui ^{[1
]}

Huang, Chen ^{[1
]}

Ma, Zhiyao ^{[1
]}

Ma, Haiying ^{[1
]}

机构：

[1] Nanjing Univ Sci & Technol, Sch Elect & Opt Engn, 200 Xiao Ling Wei, Nanjing 210094, Peoples R China

来源：

OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION XII | 2021年 / 11782卷

关键词：

Interferometer; uncertainty evaluation; interference cavity; three-flat method; CALIBRATION;

D O I：

10.1117/12.2591870

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In the development of a high-precision vertical Fizeau interferometer with 300-mm aperture, uncertainty evaluation is a significant method to assess the accuracy of interferometer. In this paper, we reported an uncertainty evaluation method. Then, the uncertainty evaluation of a 300-mm-aperture vertical Fizeau interferometer was carried out based on the method. The uncertainties of interference cavity measurement and absolute testing (e.g., three-flat method) were used as indicators of uncertainty evaluation. In addition, the gravity-induced deformation of three-flat method can be compensated accurately by finite element method modeling. Finally, we obtained the uncertainties of interference cavity measurement and three-flat method. With 300-mm aperture, the expanded uncertainty of interference cavity measurement is 3.7 x 10(-3) lambda and the expanded uncertainty of three-flat method is 1.47 x 10(-)(2) lambda.

引用

页数：9

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