Microfabrication of High-Aspect Ratio KNN Lead-Free Piezoceramic Pillar Arrays by Aqueous Gelcasting

被引：0

作者：

Wu, Cailing ^{[1
,2
]}

Li, Benke ^{[1
,2
]}

Wang, Xiaofeng ^{[1
,2
]}

Ji, Feng ^{[3
]}

Zhang, Dou ^{[4
]}

Wang, Guoping ^{[1
,2
]}

Wang, Hongqing ^{[1
,2
]}

Xie, Rui ^{[1
,2
]}

机构：

[1] Univ South China, Sch Chem & Chem Engn, Hengyang 421001, Peoples R China

[2] Univ South China, Hunan Key Lab Design & Applicat Actinide Complexe, Hengyang 421001, Peoples R China

[3] Hangzhou Silan Intergrated Circuit Co Ltd, Hangzhou 310000, Peoples R China

[4] Cent South Univ, State Key Lab Powder Met, Changsha 410083, Peoples R China

来源：

CERAMICS-SWITZERLAND | 2020年 / 3卷 / 03期

基金：

中国国家自然科学基金;

关键词：

gelcasting; potassium sodium niobate ceramic; soft mold; rheology; piezoelectric arrays; 1-3; COMPOSITES; RHEOLOGY; CHEMORHEOLOGY; TRANSDUCERS;

D O I：

10.3390/ceramics3030026

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The present paper reported a novel approach for the fabrication of a high-aspect ratio (K, Na)NbO3 (KNN) piezoelectric micropillar array via epoxy gelcasting, which involves the in situ consolidation of aqueous KNN suspensions with added hydantoin epoxy resin on a polydimethylsiloxane (PDMS) soft micromold. KNN suspensions with solid loadings of up to 45.0 vol.% have rheological behavior, which was suitable for the gelcasting process. The uniform green KNN bodies derived from the optimized suspension of 42.0 vol.% solid loading and 15.0 wt.% resin had exceptionally high mechanical strength (9.14 MPa), which was responsible for the integrity of the piezoceramic micropattern structure. The square-shaped KNN piezoelectric pillar array with lateral dimensions of up to 5 mu m and an aspect ratio of up to five was successfully fabricated.

引用

页码：287 / 296

页数：10