Ion implantation induced photosensitivity in Ge-doped silica: Effect of induced defects on refractive index changes

被引:6
作者
Essid, M
Brebner, JL
Albert, J
Awazu, K
机构
[1] Univ Montreal, Dept Phys, Grp Rech Phys & Technol Couches Minces, Montreal, PQ H3C 3J7, Canada
[2] Commun Res Ctr, Ottawa, ON K2H 8S2, Canada
关键词
refractive index; silica; ion implantation;
D O I
10.1016/S0168-583X(98)00163-3
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Planar germanosilicate thin film glasses grown by flame hydrolysis technique on silica substrate have been implanted at 5 MeV with silicon ions to a dose of 10(14) ions/cm(2), Samples were subsequently exposed to a series of KrF (5 eV) and ArF (6.4 eV) excimer laser irradiation. Optical absorption and electron spin resonance were measured before and after each series of irradiation. We report an important refractive index change that can be correlated with the photobleaching of the ion implantation induced absorption bands. (C) 1998 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:616 / 619
页数:4
相关论文
共 5 条
  • [1] PHOTOSENSITIVITY IN OPTICAL FIBER WAVEGUIDES - APPLICATION TO REFLECTION FILTER FABRICATION
    HILL, KO
    FUJII, Y
    JOHNSON, DC
    KAWASAKI, BS
    [J]. APPLIED PHYSICS LETTERS, 1978, 32 (10) : 647 - 649
  • [2] NATURE AND ORIGIN OF THE 5-EV BAND IN SIO2-GEO2 GLASSES
    HOSONO, H
    ABE, Y
    KINSER, DL
    WEEKS, RA
    MUTA, K
    KAWAZOE, H
    [J]. PHYSICAL REVIEW B, 1992, 46 (18): : 11445 - 11451
  • [3] HOSONO H, 1996, JPN J APPL PHYS B, V35, P2
  • [4] PHOTOSENSITIVITY IN PHOSPHORUS-DOPED SILICA GLASS AND OPTICAL WAVE-GUIDES
    MALO, B
    ALBERT, J
    BILODEAU, F
    KITAGAWA, T
    JOHNSON, DC
    HILL, KO
    HATTORI, K
    HIBINO, Y
    GUJRATHI, S
    [J]. APPLIED PHYSICS LETTERS, 1994, 65 (04) : 394 - 396
  • [5] Photorefractive waveguides produced by ion-implantation of fused silica
    Verhaegen, M
    Allard, LB
    Brebner, JL
    Essid, M
    Roorda, S
    Albert, J
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 106 (1-4) : 438 - 441