Surface and bulk properties of boride/nitride nanoscale films

被引：0

作者：

Andrievski, RA ^{[1
]}

机构：

[1] Russian Acad Sci, Inst New Chem Problems, Chernogolovka 142432, Moscow Region, Russia

来源：

SURFACE-CONTROLLED NANOSCALE MATERIALS FOR HIGH-ADDED-VALUE APPLICATIONS | 1998年 / 501卷

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Nanoscale TiB2/TiN films have been prepared by d.c. and r.f. magnetron non-reactive sputtering and examined by TEM, SAED, SEM, AES, XPS, XRD, AFM as well as nanoindentation. Attention has been focused on both bulk and surface physical-mechanical properties. The effect of the latter on the nanoindentaion test results seems to be very important. Two types of film fracture under a Vickers indentor connected with homogeneous and inhomogeneous deformation have been described.

引用

页码：149 / 160

页数：12