Pb-free resistor for Pb-free LTCC system

被引:0
|
作者
Fukaya, M [1 ]
Higuchi, C [1 ]
机构
[1] SMIED Ogaki Ceram Inc, Gifu 5030034, Japan
来源
2000 INTERNATIONAL SYMPOSIUM ON MICROELECTRONICS | 2000年 / 4339卷
关键词
Pb-free; LTCC; low thermal expansion resistor; SiO2-B2O3-K2O glass; and 850 degrees C firing;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
There exist various stresses generated by the affects of the internal wiring in LTCC (Multi Layered Low Temperature Firable Ceramic Circuit Board). Because of these stresses, thick film resistor formed on the surface layer drifts after resistor trimming and this is an obstruction for the high density design. Authors performed the FEM (Finite Element Method) for the analysis of the stress and found that significantly lower thermal coefficient of expansion (TCE) of resistor than LTCC is effective to the resistance drifts. Based on the analysis results, highly reliable Pb-free low thermal expansion resistor for high density LTCC was developed. Using low thermal expansion of SiO2-B2O3-K2O as main glass, the wettability with glass is secured by coated K2O on the conductive material of RuO2. It was successfully achieved to satisfy both low thermal expansion and electric properties. The developed resistor is fired in the same temperature as the conventional resistors at 850 degreesC. The highly reliable Pb-free LTCC system is established by using this resistor.
引用
收藏
页码:636 / 641
页数:6
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