Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures

被引：30

作者：

Zhang, Zilong ^{[1
,2
]}

Wu, Yuanzhao ^{[3
]}

Sang, Liwen ^{[1
]}

Wu, Haihua ^{[1
]}

Huang, Jian ^{[2
]}

Wang, Linjun ^{[2
]}

Takahashi, Yukiko ^{[1
]}

Li, Runwei ^{[3
]}

Koizumi, Satoshi ^{[1
]}

Toda, Masaya ^{[4
]}

Akita, Indianto Mohammad ^{[4
]}

Koide, Yasuo ^{[1
]}

Liao, Meiyong ^{[1
]}

机构：

[1] Natl Inst Mat Sci, Namiki 1-1, Tsukuba, Ibaraki 3050044, Japan

[2] Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200114, Peoples R China

[3] Chinese Acad Sci Ningbo, Ningbo, Peoples R China

[4] Tohoku Univ, Grad Sch Engn, Sendai, Miyagi, Japan

来源：

MATERIALS RESEARCH LETTERS | 2020年 / 8卷 / 05期

关键词：

Single-crystal diamond; galfenol (FeGa); magnetostrictive effect; MEMS; GA; SENSORS; MAGNETORESISTANCE; MAGNETOSTRICTION; STABILITY;

D O I：

10.1080/21663831.2020.1734680

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Micro-electromechanical systems (MEMS) magnetic sensing at high temperatures over 573 K has not been achieved due to the difficulty in designing the rational interface with strong coupling. Here, a magnetic sensor based on FeGa/single-crystal diamond (SCD) MEMS resonator is realized to circumvent the challenges in magnetic sensing. The present magnetic sensor exhibits a stable high-sensitivity of 7.3 Hz/mT at 573 K and an experimental noise level of similar to 4nT/root Hz. The performance exceeds those of reported high-temperature magnetic sensors. This work offers a strategy for developing magnetic sensors with merits super to the existing ones. [GRAPHICS] .

引用

页码：180 / 186

页数：7

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