Morphological and structural characterization of CrO2/Cr2O3 films grown by laser-CVD

被引：64
作者：
Sousa, PM
Silvestre, AJ
Popovici, N
Conde, O
机构：
[1] Univ Lisbon, Dept Fis, P-1749016 Lisbon, Portugal
[2] Inst Super Engn Lisboa, P-1950062 Lisbon, Portugal
来源：
APPLIED SURFACE SCIENCE | 2005年 / 247卷 / 1-4期
关键词：
laser-assisted CVD; photodissociation; CrO2/Cr2O3 two-phase system;
D O I：
10.1016/j.apsusc.2005.01.061
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
This work reports on the synthesis of chromium (III, IV) oxides films by KrF laser-assisted CVD. Films were deposited onto sapphire substrates at room temperature by the photodissociation of Cr(CO)(6) in dynamic atmospheres containing oxygen and argon. A study of the processing parameters has shown that partial pressure ratio Of O-2 to Cr(CO)(6) and laser fluence are the prominent parameters that have to be accurately controlled in order to co-deposit both the crystalline oxide phases. Films consistent with such a two-phase system were synthesised for a laser fluence of 75 mJ cm(-2) and a partial pressure ratio of about 1. (c) 2005 Elsevier B.V. All rights reserved.
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页码：423 / 428
页数：6
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