Intermodulation in capacitively coupled microelectromechanical filters

被引：18

作者：

Alastalo, AT ^{[1
]}

Kaajakari, V ^{[1
]}

机构：

[1] VTT Tech Res Ctr Finland, VTT Informat Technol, Microsensing, FIN-02044 Espoo, Finland

来源：

IEEE ELECTRON DEVICE LETTERS | 2005年 / 26卷 / 05期

基金：

芬兰科学院;

关键词：

communication systems; filter distortion; filters; intermodulation distortion; microelectromechanical devices;

D O I：

10.1109/LED.2005.846589

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A compact model for third-order intermodulation in capacitively coupled microelectromechanical filters is derived. A simple expression for the input third-order intercept point is given. This is valuable in designing micromechanical filters, for example, for communication applications. The validity of the analytic model is verified with numerical harmonic-balance simulations and experimental measurements.

引用

页码：289 / 291

页数：3

共 13 条

[1]

*ETSI, 2003, 05010505 3GPP TS ETS

[2] Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications [J].

Kaajakari, V ;

Mattila, T ;

Qja, A ;

Kiihamäki, J ;

Seppä, H .

IEEE ELECTRON DEVICE LETTERS, 2004, 25 (04) :173-175

[3] Nonlinear limits for single-crystal silicon microresonators [J].

Kaajakari, V ;

Mattila, T ;

Oja, A ;

Seppä, H .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2004, 13 (05) :715-724

[4]

Lee T, 2004, DESIGN CMOS RADIO FR

[5] 14 MHz micromechanical oscillator [J].

Mattila, T ;

Jaakkola, O ;

Kiihamäki, J ;

Karttunen, J ;

Lamminmäki, T ;

Rantakari, P ;

Oja, A ;

Seppä, H ;

Kattelus, H ;

Tittonen, I .

SENSORS AND ACTUATORS A-PHYSICAL, 2002, 97-8 :497-502

[6]

MENG Q, 1993, J MICROELECTROMECHAN, V2, P128

[7] Third-order intermodulation distortion in capacitively-driven CC-beam micromechanical resonators [J].

Navid, R ;

Clark, JR ;

Demirci, M ;

Nguyen, CTC .

14TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2001, :228-231

[8] Frequency-selective MEMS for miniaturized low-power communication devices [J].

Nguyen, CTC .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1999, 47 (08) :1486-1503

[9]

Razavi B, 2011, RF Microelectronics, V2nd

[10] Modeling of nonlinear micromechanical resonators and their simulation with the harmonic-balance method [J].

Veijola, T ;

Mattila, T .

INTERNATIONAL JOURNAL OF RF AND MICROWAVE COMPUTER-AIDED ENGINEERING, 2001, 11 (05) :310-321

← 1 2 →