Fabrication and surface treatment of electron-beam evaporated niobium for low-loss coplanar waveguide resonators

被引：9

作者：

Kowsari, D. ^{[1
]}

Zheng, K. ^{[1
]}

Monroe, J. T. ^{[1
]}

Thobaben, N. J. ^{[2
]}

Du, X. ^{[1
]}

Harrington, P. M. ^{[1
,3
]}

Henriksen, E. A. ^{[1
,4
]}

Wisbey, D. S. ^{[2
]}

Murch, K. W. ^{[1
]}

机构：

[1] Washington Univ, Dept Phys, St Louis, MO 63130 USA

[2] St Louis Univ, Dept Phys, St Louis, MO 63103 USA

[3] MIT, Res Lab Elect, Cambridge, MA 02139 USA

[4] Washington Univ, Inst Mat Sci & Engn, St Louis, MO 63130 USA

来源：

APPLIED PHYSICS LETTERS | 2021年 / 119卷 / 13期

关键词：

DIELECTRIC LOSS; SUPERCONDUCTIVITY;

D O I：

10.1063/5.0066441

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We characterize low-loss electron-beam evaporated niobium thin films deposited under ultra-high vacuum conditions. Slow deposition yields films with a high superconducting transition temperature (9.20 +/- 0.06 K) as well as a residual resistivity ratio of 4.8. We fabricate the films into coplanar waveguide resonators to extract the intrinsic loss due to the presence of two-level-system fluctuators using microwave measurements. For a coplanar waveguide resonator gap of 2 mu m, the films exhibit filling-factor-adjusted two-level-system loss tangents as low as 1.5 x 10(-7) with single-photon regime internal quality factors in excess of one million after removing native surface oxides of the niobium. Published under an exclusive license by AIP Publishing.

引用

页数：6

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