A solid-state hydrocarbon sensor for environmental applications

被引:1
作者
Gurbuz, Y [1 ]
Kang, WP [1 ]
Davidson, JL [1 ]
Kerns, DV [1 ]
机构
[1] Sabanci Univ, Fac Engn & Nat Sci, TR-34956 Istanbul, Turkey
来源
PROCEEDINGS OF THE IEEE SENSORS 2003, VOLS 1 AND 2 | 2003年
关键词
D O I
10.1109/ICSENS.2003.1279126
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have applied CVD (chemical vapor deposition) diamond chemical sensor to detect benzene and toluene, volatile organic compounds, possible indication of the existence of environmental hazardous and petroleum in soil/subsoil. Steady-state and transient response of the sensor for both gases have been extensively studied. These studies have shown that the sensor shows a large sensitivity, fast response, high selectivity, large dynamic range, repeatable/reproducible response for the detection of benzene and toluene gases. Activation energy analysis of the sensor for both gases resulted very small values, confirming fast response and high selectivity.
引用
收藏
页码:1159 / 1163
页数:5
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