Effective radius of adatoms/single atom of polycrystalline W nanotip in gas field ion source

被引：4

作者：

Adhikari, Bishwa Chandra ^{[1
]}

Kim, Ju Sung ^{[1
]}

Mumtaz, Sohail ^{[1
]}

Paneru, Ramhari ^{[1
]}

Lamichhane, Pradeep ^{[1
]}

Min, Boo Ki ^{[2
]}

Jang, Jung Hyun ^{[1
]}

Choi, Eun Ha ^{[1
]}

机构：

[1] Kwangwoon Univ, Plasma Biosci Res Ctr, Dept Elect & Biol Phys, Seoul 01897, South Korea

[2] Korea Basic Sci Inst, Ochang Ctr, Mass Spectrometry & Adv Instrumentat Res Grp, Chungbuk 28119, South Korea

来源：

CURRENT APPLIED PHYSICS | 2020年 / 20卷 / 05期

基金：

新加坡国家研究基金会;

关键词：

Gas field ion source; Field ionization and field evaporation; Field emission; Fowler-Nordheim plot; Single atom tip; Ion emitting effective radius; TIPS; MICROSCOPY; EMISSION; FABRICATION; ELECTRON; HE;

D O I：

10.1016/j.cap.2020.03.004

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A gas field ion source (GFIS) has several advantages such as high current density, low energy spread, and high brightness. In this study, Helium gas was used in a GFIS, generated using the field ionization and field evaporation processes. The (110) oriented three adatoms tip (TAT) and single atom tip (SAT) were prepared with its ion emission stability 9.8% and 10.1% by the nitrogen field-assisted etching, respectively. The TAT and SAT were reproduced throughout the field evaporation and nitrogen field-assisted etching along the same crystal axis with its brightness 2.6 x 10(7) A/(m(2) sr) and 1.6 x 10(8) A/(m(2) sr), respectively. The field emission electron beam effective radii for three adatoms and single atom were calculated to be 2.90 angstrom and 1.47 angstrom, respectively, by Fowler-Nordheim plot, in which the single atom size was especially shown to be quite in good consistency with an atomic radius of tungsten.

引用

页码：707 / 714

页数：8

共 35 条

[1] Application of helium ion microscopy to nanostructured polymer materials [J].

Bliznyuk, Valery N. ;

LaJeunesse, Dennis ;

Boseman, Adam .

NANOTECHNOLOGY REVIEWS, 2014, 3 (04) :361-387

[2] Ionoluminescence in the Helium Ion Microscope [J].

Boden, Stuart A. ;

Franklin, Thomas M. W. ;

Scipioni, Larry ;

Bagnall, Darren M. ;

Rutt, Harvey N. .

MICROSCOPY AND MICROANALYSIS, 2012, 18 (06) :1253-1262

[3] A method of microtip fabrication based on oxygen induced faceting [J].

Bryl, R ;

Szczepkowicz, A .

APPLIED SURFACE SCIENCE, 2005, 241 (3-4) :431-434

[4] The influence of the oxygen exposure on the thermal faceting of W[111] tip [J].

Bryl, Robert ;

Szczepkowicz, Andrzej .

APPLIED SURFACE SCIENCE, 2006, 252 (24) :8526-8532

[5] Ion emission and electric field characteristics in the liquid metal ion source with a new suppressor electrode [J].

Cho, Byeong Seong ;

Oh, Hyun Joo ;

Uhm, Han S. ;

Kang, Seung Oun ;

Kim, Changjo ;

Choi, Yoon ;

Choi, Eun Ha .

CURRENT APPLIED PHYSICS, 2011, 11 (05) :S172-S176

[6] Recommended values of clean metal surface work functions [J].

Derry, Gregory N. ;

Kern, Megan E. ;

Worth, Eli H. .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2015, 33 (06)

[7] The history and development of the helium ion microscope [J].

Economou, Nicholas P. ;

Notte, John A. ;

Thompson, William B. .

SCANNING, 2012, 34 (02) :83-89

[8]

GOMER R, 1961, FIELD EMISSION FIELD, P32

[9] Brightness measurements of a gallium liquid metal ion source [J].

Hagen, C. W. ;

Fokkema, E. ;

Kruit, P. .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2008, 26 (06) :2091-2096

[10]

Hawkes P., 2009, Cold field emission and the scanning transmission electron microscope

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