Subwavelength grating periodic structures in silicon-on-insulator: a new type of microphotonic waveguide

被引：269

作者：

Bock, Przemek J. ^{[1
,2
]}

Cheben, Pavel ^{[1
]}

Schmid, Jens H. ^{[1
]}

Lapointe, Jean ^{[1
]}

Delage, Andre ^{[1
]}

Janz, Siegfried ^{[1
]}

Aers, Geof C. ^{[1
]}

Xu, Dan-Xia ^{[1
]}

Densmore, Adam ^{[1
]}

Hall, Trevor J. ^{[2
]}

机构：

[1] Natl Res Council Canada, Inst Microstruct Sci, Ottawa, ON, Canada

[2] Univ Ottawa, Ctr Res Photon, Ottawa, ON, Canada

来源：

OPTICS EXPRESS | 2010年 / 18卷 / 19期

关键词：

RING RESONATORS; SCATTERING LOSS; PHOTONIC WIRES; SLOW LIGHT; MODE; PROPAGATION;

D O I：

10.1364/OE.18.020251

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report on the experimental demonstration and analysis of a new waveguide principle using subwavelength gratings. Unlike other periodic waveguides such as line-defects in a 2D photonic crystal lattice, a subwavelength grating waveguide confines the light as a conventional index-guided structure and does not exhibit optically resonant behaviour. Subwavelength grating waveguides in silicon-on-insulator are fabricated with a single etch step and allow for flexible control of the effective refractive index of the waveguide core simply by lithographic patterning. Experimental measurements indicate a propagation loss as low as 2.1 dB/cm for subwavelength grating waveguides with negligible polarization and wavelength dependent loss, which compares favourably to conventional microphotonic silicon waveguides. The measured group index is nearly constant n(g) similar to 1.5 over a wavelength range exceeding the telecom C-band. (C) 2010 Optical Society of America

引用

页码：20251 / 20262

页数：12

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