Optimization of deformation shape of an active electro-optical focusing device

被引：0

作者：

Yuan, Ting ^{[1
,2
]}

Mescheder, Ulrich ^{[2
]}

Kronast, Wolfgang ^{[2
]}

Wang, Changlong ^{[1
]}

机构：

[1] Yangzhou Univ, Coll Mech Engn, Yangzhou 225009, Jiangsu, Peoples R China

[2] Hochschule Furtwangen Univ, Dept Comp & Elect Engn, D-78120 Furtwangen, Germany

来源：

MATERIALS PROCESSING TECHNOLOGY, PTS 1-4 | 2011年 / 291-294卷

关键词：

Optimization; deformation shape; focusing device; FEM simulation;

D O I：

10.4028/www.scientific.net/AMR.291-294.3116

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Severe deformation which was induced by internal (residual) stress was observed on the MOEMS focusing device without driving voltage. Based on beam suspended membrane, FEM software COMSOL Multiphysics was used to predict the deformation induced by internal stress, model parameters (beam width and length), boundary condition of the chip. Found the parameters which can make the membrane be relative flat initially. Expanded the model including ring shaped electrode, using COMSOL coupled fields(AC/DC-Electrostatics module, Structural Mechanics-Solid Mechanics module and Mathematics-Deformed Mesh-Moving Mesh module), found the inner radius of ring shaped electrode which can get perfect parabolic shape of membrane with large maximum relative deflection under driving voltage.

引用

页码：3116 / +

页数：2