Scanning Electron Microscopy Study of Charging Phenomena on Insulating Materials

被引：2
|
作者：
Boughariou, A. [1 ]
Blaise, G. [2 ]
机构：
[1] Univ Sfax Sud, Fac Sci, Sfax 3038, Tunisia
[2] Univ Paris Sud XI, LPS, F-91405 Orsay, France
来源：
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 2022年 / 65卷 / 05期
关键词：
KINETICS;
D O I：
10.1134/S0020441222050219
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Charging phenomena of insulating materials were studied thanks to a scanning electron microscope SEM LEO 440 which allows the injection of electrons doses in a large domain of energies and the measurements of the secondary electron emission and the induced current created in the sample holder by the charges generated in the sample. The results show that the secondary electron emission yield is a very sensitive parameter to characterise the charging state of an insulator.
引用
收藏
页码：782 / 786
页数：5
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