HgCdTe epilayers on GaAs: growth and devices

被引:26
作者
Varavin, VS [1 ]
Vasiliev, VV [1 ]
Dvoretsky, SA [1 ]
Mikhailov, NN [1 ]
Ovsyuk, VN [1 ]
Sidorov, YG [1 ]
Suslyakov, AO [1 ]
Yakushev, MV [1 ]
Aseev, AL [1 ]
机构
[1] Russian Acad Sci, Inst Semicond Phys, Novosibirsk 630090, Russia
来源
SOLID STATE CRYSTALS 2002: CRYSTALLINE MATERIALS FOR OPTOELECTRONICS | 2003年 / 5136卷
关键词
MCT; MBE; growth; GaAs; Si; ellipsometer; heterostructure (HS); infrared detector (IRD); photoconductor; photodiode; focal plane array; p-n junction;
D O I
10.1117/12.519761
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
View of basic and specific physical and chemical features of growth and defect formation in mercury cadmium telluride (MCT) heterostructures (HS's) on GaAs substrates by molecular beam epitaxy (MBE) was made. On the basis of this knowledge a new generation of ultra high vacuum set, ultra-fast ellipsometer of high accuracy and automatic system for control of technological processes was produced for reproducibility of MCT Hs's growth on substrates up to 4" in diameter. The development of industrially oriented technology of MCT HS's growth by MBE on GaAs substrates 2" in diameter and without intentional doping is presented. The electrical characteristics of n-type and p-type of MCT HS's and uniformity of MCT composition over the surface area are excellent. The residual donor and acceptor centres are supposed as hypothetically tellurium atoms in metallic sublattice ("antisite" tellurium) and double-ionised mercury vacancies. The technology of fabricating focal plane arrays is developed. The high quality characteristics of infrared detectors conductance and diode mode are measured. Calculations of detector parameters predicted the improvement in serial resistance and detectivity of infrared diode detectors based on MCT heterostructures with graded composition throughout the thickness.
引用
收藏
页码:381 / 395
页数:15
相关论文
共 35 条
  • [1] ABSORPTION CONSTANT OF PB1-XSNXTE AND HG1-XCDXTE ALLOYS
    ANDERSON, WW
    [J]. INFRARED PHYSICS, 1980, 20 (06): : 363 - 372
  • [2] INFRARED DIODES FABRICATED WITH HGCDTE GROWN BY MOLECULAR-BEAM EPITAXY ON GAAS SUBSTRATES
    ARIAS, JM
    DEWAMES, RE
    SHIN, SH
    PASKO, JG
    CHEN, JS
    GERTNER, ER
    [J]. APPLIED PHYSICS LETTERS, 1989, 54 (11) : 1025 - 1027
  • [3] DISLOCATION DENSITY REDUCTION BY THERMAL ANNEALING OF HGCDTE EPILAYERS GROWN BY MOLECULAR-BEAM EPITAXY ON GAAS SUBSTRATES
    ARIAS, JM
    ZANDIAN, M
    SHIN, SH
    MCLEVIGE, WV
    PASKO, JG
    DEWAMES, RE
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (03): : 1646 - 1650
  • [4] ARIAS JM, 1994, PROPERTIES NARROW GA, P30
  • [5] HIGH-RESOLUTION PHOTOLUMINESCENCE STUDIES OF (211) CDTE GROWN ON (211)B GAAS SUBSTRATE
    CHEN, SD
    LIN, L
    HE, XZ
    XU, ZY
    LUO, CP
    XU, JZ
    [J]. JOURNAL OF CRYSTAL GROWTH, 1994, 140 (3-4) : 287 - 290
  • [6] MWIR DLPH HgCdTe photodiode performance dependence on substrate material
    D'Souza, AI
    Bajaj, J
    De Wames, RE
    Edwall, DD
    Wijewarnasuriya, PS
    Nayar, N
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 1998, 27 (06) : 727 - 732
  • [7] Large VLWIR Hg1-xCdxTe photovoltaic detectors
    D'Souza, AI
    Dawson, LC
    Staller, C
    Wijewarnasuriya, PS
    Dewames, RE
    McLevige, WV
    Arias, JM
    Edwall, D
    Hildebrandt, G
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 2000, 29 (06) : 630 - 635
  • [8] MOLECULAR-BEAM EPITAXIAL-GROWTH OF CDTE(112) ON SI(112) SUBSTRATES
    DELYON, TJ
    RAJAVEL, D
    JOHNSON, SM
    COCKRUM, CA
    [J]. APPLIED PHYSICS LETTERS, 1995, 66 (16) : 2119 - 2121
  • [9] DEWAMES RE, 1998, J ELECT MAT, V27, P772
  • [10] DVORETSKY SA, 1991, POVERKHNOST, V9, P45