A dense titania (TiO2) coating was deposited from an ethanol solution containing titanium isopropoxide using the solution precursor plasma spray process. Thermal and crystallization behaviors of the solution precursor were investigated by thermal gravimetric analysis-differential thermal analysis, Fourier-transform infrared spectrum, and X-ray diffraction (XRD). XRD and Raman spectrum analyses confirmed that the coating is exclusively composed of rutile TiO2. Scanning electron micrographs show the as-sprayed coating is dense with uniform thickness and there are no coarse splat boundaries. The individual ultrafine splats (1-5 mu m diameter) are composed of columnar grains. X-ray photoelectron spectroscopy analysis indicates that some Ti-OH groups exist in the as-sprayed coating surface. Deposition mechanisms are described based on model experiments.