Three-dimensional piezoelectric polymer microsystems for vibrational energy harvesting, robotic interfaces and biomedical implants

被引:391
作者
Han, Mengdi [1 ]
Wang, Heling [2 ,3 ,4 ,5 ]
Yang, Yiyuan [3 ]
Liang, Cunman [1 ,6 ]
Bai, Wubin [1 ,2 ]
Yan, Zheng [7 ,8 ]
Li, Haibo [4 ,5 ,9 ]
Xue, Yeguang [2 ,3 ,4 ,5 ]
Wang, Xinlong [10 ]
Akar, Banu [10 ]
Zhao, Hangbo [1 ]
Luan, Haiwen [2 ,3 ,4 ,5 ]
Lim, Jaeman [1 ]
Kandela, Irawati [11 ]
Ameer, Guillermo A. [10 ,12 ,13 ]
Zhang, Yihui [14 ,15 ,16 ]
Huang, Yonggang [1 ,2 ,3 ,4 ,5 ]
Rogers, John A. [1 ,2 ,3 ,10 ,13 ,17 ,18 ,19 ,20 ,21 ]
机构
[1] Northwestern Univ, Ctr Biointegrated Elect, Evanston, IL 60208 USA
[2] Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USA
[3] Northwestern Univ, Dept Mech Engn, Evanston, IL 60208 USA
[4] Northwestern Univ, Dept Civil Engn, Evanston, IL 60208 USA
[5] Northwestern Univ, Dept Environm Engn, Evanston, IL 60208 USA
[6] Tianjin Univ, Sch Mech Engn, Minist Educ, Key Lab Mech Theory & Equipment Design, Tianjin, Peoples R China
[7] Univ Missouri, Dept Biomed Biol & Chem Engn, Columbia, MO USA
[8] Univ Missouri, Dept Mech & Aerosp Engn, Columbia, MO 65211 USA
[9] Shanghai Jiao Tong Univ, State Key Lab Ocean Engn, Sch Naval Architecture Ocean & Civil Engn, Shanghai, Peoples R China
[10] Northwestern Univ, Dept Biomed Engn, Evanston, IL 60208 USA
[11] Northwestern Univ, Ctr Dev Therapeut, Evanston, IL USA
[12] Northwestern Univ, Dept Surg, Feinberg Sch Med, Chicago, IL USA
[13] Northwestern Univ, Ctr Adv Regenerat Engn, Evanston, IL 60208 USA
[14] Tsinghua Univ, Ctr Flexible Elect Technol, Beijing, Peoples R China
[15] Tsinghua Univ, Ctr Mech & Mat, Beijing, Peoples R China
[16] Tsinghua Univ, Dept Engn Mech, AML, Beijing, Peoples R China
[17] Northwestern Univ, Dept Neurol Surg, Evanston, IL 60208 USA
[18] Northwestern Univ, Dept Chem, Evanston, IL 60208 USA
[19] Northwestern Univ, Dept Elect Engn, Evanston, IL 60208 USA
[20] Northwestern Univ, Dept Comp Sci, Evanston, IL 60208 USA
[21] Northwestern Univ, Simpson Querrey Inst BioNanotechnol, Evanston, IL 60208 USA
基金
中国国家自然科学基金;
关键词
NANOGENERATOR; CONVERSION; FORCE;
D O I
10.1038/s41928-018-0189-7
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Piezoelectric microsystems are of use in areas such as mechanical sensing, energy conversion and robotics. The systems typically have a planar structure, but transforming them into complex three-dimensional (3D) frameworks could enhance and extend their various modes of operation. Here, we report a controlled, nonlinear buckling process to convert lithographically defined two-dimensional patterns of electrodes and thin films of piezoelectric polymers into sophisticated 3D piezoelectric microsystems. To illustrate the engineering versatility of the approach, we create more than twenty different 3D geometries. With these structures, we then demonstrate applications in energy harvesting with tailored mechanical properties and root-mean-square voltages ranging from 2 mV to 790 mV, in multifunctional sensors for robotic prosthetic interfaces with improved responsivity (for example, anisotropic responses and sensitivity of 60 mV N-1 for normal force), and in bio-integrated devices with in vivo operational capabilities. The 3D geometries, especially those with ultralow stiffnesses or asymmetric layouts, yield unique mechanical attributes and levels of functionality that would be difficult or impossible to achieve with conventional two-dimensional designs.
引用
收藏
页码:26 / 35
页数:10
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