A scanning phase-knife technique for quantitative surface slope measurements and defect identification

被引:0
作者
Wilkins, PR [1 ]
Knight, PD [1 ]
Pigg, DC [1 ]
机构
[1] Univ Calif Lawrence Livermore Natl Lab, Livermore, CA 94550 USA
来源
PROCEEDINGS OF THE FOURTEENTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1999年
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中图分类号
T [工业技术];
学科分类号
08 ;
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页码:348 / 351
页数:4
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