Numerical analysis of time-of-flight distributions of neutral particles for pulsed laser ablation of binary substances into vacuum

被引:9
作者
Morozov, Alexey A. [1 ]
Mironova, Marina L. [1 ]
机构
[1] RAS, SB, Kutateladze Inst Thermophys, Lavrentyev Ave 1, Novosibirsk 630090, Russia
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2017年 / 123卷 / 12期
基金
俄罗斯基础研究基金会;
关键词
DESORPTION; GAS; STOICHIOMETRY; COLLISIONS; MOLECULES; SURFACES; TARGETS;
D O I
10.1007/s00339-017-1400-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Direct Monte Carlo simulation of the laser-induced plume expansion under pulsed laser evaporation of binary substances into vacuum has been performed. Analysis of separation of the mixture components has been carried out for a wide range of the problem parameters: the mass ratio, the number of evaporated monolayers, and the initial mixture concentration. Special attention has been paid to examination of the mixture separation and changing the mixture concentration for particles passing through the time-of-flight detector located on the normal to the evaporating surface. Universal dependences of the energy and concentration ratios of species passing through the time-of-flight detector on the number of evaporated monolayers have been obtained. It is shown that these dependences can be used for analysis of any experimental data independently on the concentration ratio. The obtained relations well correlate with known numerical and experimental data on gas phase separation under pulsed evaporation into vacuum. The obtained results allow to completely determine the conditions at the evaporating surface (the surface temperature, the number of evaporated monolayers, and the initial mixture composition) from experimentally measured time-of-flight distributions of neutral particles.
引用
收藏
页数:9
相关论文
共 18 条
[1]   Transfer of stoichiometry during pulsed laser ablation of multicomponent magnetic targets [J].
Acquaviva, S ;
D'Anna, E ;
De Giorgi, ML ;
Fernandez, M ;
Luches, A ;
Majni, G ;
Luby, S ;
Majkova, E .
APPLIED SURFACE SCIENCE, 2005, 248 (1-4) :286-290
[2]  
Bird G., 1994, MOL GAS DYNAMICS DIR
[3]   Pulsed laser ablation of solids: transition from normal vaporization to phase explosion [J].
Bulgakova, NM ;
Bulgakov, AV .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2001, 73 (02) :199-208
[4]  
B┬u├▒uerle D., 2013, LASER PROCESSING CHE
[5]  
Chrisey B., 1994, PULSED LASER DEPOSIT
[6]   EFFECTS OF POST-DESORPTION COLLISIONS ON THE ENERGY-DISTRIBUTION OF SICL MOLECULES PULSED-LASER DESORBED FROM CL-COVERED SI SURFACES - MONTE-CARLO SIMULATIONS COMPARED TO EXPERIMENTS [J].
FEIL, H ;
BALLER, TS ;
DIELEMAN, J .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1992, 55 (06) :554-560
[7]   Monte Carlo simulation of pulsed laser ablation from two-component target into diluted ambient gas [J].
Itina, TE ;
Marine, W ;
Autric, M .
JOURNAL OF APPLIED PHYSICS, 1997, 82 (07) :3536-3542
[8]   Influence of particle adsorption probability on the stoichiometry of thin films grown by pulsed laser deposition [J].
Itina, TE .
JOURNAL OF APPLIED PHYSICS, 2001, 89 (01) :740-746
[9]   Considerations on the determining factors of the angular distribution of emitted particles in laser ablation [J].
Konomi, I. ;
Motohiro, T. ;
Kobayashi, T. ;
Asaoka, T. .
APPLIED SURFACE SCIENCE, 2010, 256 (16) :4959-4965
[10]   LASER SPUTTERING OF HIGHLY ORIENTED PYROLYTIC-GRAPHITE AT 248-NM [J].
KRAJNOVICH, DJ .
JOURNAL OF CHEMICAL PHYSICS, 1995, 102 (02) :726-743