Experimental study of the effect of hydrodynamic coupling of micro-cantilever array on the dynamic response of micro-cantilever

被引：2
|
作者：
Lee, Jiunn-Horng [2 ,3 ]
Lau, Yung-Dong [1 ]
Yao, Chih-Min [3 ]
Fang, Weileun [1 ,2 ]
机构：
[1] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu, Taiwan
[2] Natl Tsing Hua Univ, Inst NanoEngn & MicroSyst, Hsinchu, Taiwan
[3] Natl Ctr High Performance Comp, Natl Appl Res Labs, Hsinchu, Taiwan
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2011年 / 165卷 / 01期
关键词：
Micro-cantilever array; Quality factor; Air damping; Hydrodynamic force; QUALITY FACTOR; MICROCANTILEVERS; RESONATORS; BIOSENSORS; SENSORS; FORCE; MEMS;
D O I：
10.1016/j.sna.2009.12.024
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This study experimentally investigates the effect of hydrodynamic coupling of a micro-cantilever array on the dynamic response of a micro-cantilever. The micro-cantilever array consists of three harmonically driven micro-cantilevers dynamically coupled through air flow. The right cantilever and left cantilever (auxiliary-cantilevers) adjacent to the middle cantilever (operating-cantilever) are exploited to generate hydrodynamic force to change the air damping of operating-cantilever. Thus, the quality factor of operating-cantilever can be controlled by changing the phase and magnitude of excitation force on auxiliary-cantilevers, and varying the gap between auxiliary-cantilevers and operating-cantilever. In the experiment, magnetic actuated micro-cantilever arrays were fabricated and characterized. Measurements show the variation of quality factor of operating-cantilever is from -39% to +27%. (c) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码：79 / 85
页数：7
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