Experimental study of the effect of hydrodynamic coupling of micro-cantilever array on the dynamic response of micro-cantilever

被引：2
|
作者：
Lee, Jiunn-Horng [2 ,3 ]
Lau, Yung-Dong [1 ]
Yao, Chih-Min [3 ]
Fang, Weileun [1 ,2 ]
机构：
[1] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu, Taiwan
[2] Natl Tsing Hua Univ, Inst NanoEngn & MicroSyst, Hsinchu, Taiwan
[3] Natl Ctr High Performance Comp, Natl Appl Res Labs, Hsinchu, Taiwan
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2011年 / 165卷 / 01期
关键词：
Micro-cantilever array; Quality factor; Air damping; Hydrodynamic force; QUALITY FACTOR; MICROCANTILEVERS; RESONATORS; BIOSENSORS; SENSORS; FORCE; MEMS;
D O I：
10.1016/j.sna.2009.12.024
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This study experimentally investigates the effect of hydrodynamic coupling of a micro-cantilever array on the dynamic response of a micro-cantilever. The micro-cantilever array consists of three harmonically driven micro-cantilevers dynamically coupled through air flow. The right cantilever and left cantilever (auxiliary-cantilevers) adjacent to the middle cantilever (operating-cantilever) are exploited to generate hydrodynamic force to change the air damping of operating-cantilever. Thus, the quality factor of operating-cantilever can be controlled by changing the phase and magnitude of excitation force on auxiliary-cantilevers, and varying the gap between auxiliary-cantilevers and operating-cantilever. In the experiment, magnetic actuated micro-cantilever arrays were fabricated and characterized. Measurements show the variation of quality factor of operating-cantilever is from -39% to +27%. (c) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码：79 / 85
页数：7
相关论文
共 50 条
  • [11] Adhesive failure of micro-cantilever beams
    Fan, Kangqi
    Jia, Jianyuan
    Zhu, Yingmin
    PROCEEDINGS OF THE 2006 IEEE/ASME INTERNATIONAL CONFERENCE ON MECHATRONIC AND EMBEDDED SYSTEMS AND APPLICATIONS, 2006, : 92 - +
  • [12] Simple and versatile micro-cantilever sensors
    Rinaldi, Gino
    Packirisamy, Muthukumaran
    Stiharu, Ion
    Mrad, Nezih
    SENSOR REVIEW, 2009, 29 (01) : 44 - 53
  • [13] Modeling of ferroelectric micro-cantilever actuator
    Nguyen, B. H.
    Czarnecki, P.
    Zunic, M.
    Torri, G. B.
    Rochus, V.
    2023 SYMPOSIUM ON DESIGN, TEST, INTEGRATION & PACKAGING OF MEMS/MOEMS, DTIP, 2023,
  • [14] Analysis and control of micro-cantilever in dynamic mode AFM
    Moharam Habibnejad Korayem
    S. Zafari
    A. Amanati
    M. Damircheli
    N. Ebrahimi
    The International Journal of Advanced Manufacturing Technology, 2010, 50 : 979 - 990
  • [15] A discrete dislocation plasticity study of the micro-cantilever size effect
    Tarleton, E.
    Balint, D. S.
    Gong, J.
    Wilkinson, A. J.
    ACTA MATERIALIA, 2015, 88 : 271 - 282
  • [16] Micro-Cantilever Anemometer for Cryogenic Helium
    Salort, J.
    Monfardini, A.
    Roche, P-E
    13TH EUROPEAN TURBULENCE CONFERENCE (ETC13): REACTING, COMPRESSIBLE, MULTI-PHASE AND CRYOGENIC FLOWS, 2011, 318
  • [17] Micro-cantilever array pressure measurement system for biomedical instrumentation
    Qu, Wenchao
    Islam, Syed K.
    To, Gary
    Mahfouz, Mohamed R.
    2007 IEEE SENSORS, VOLS 1-3, 2007, : 1009 - 1012
  • [18] Active optical phased array integrated within a micro-cantilever
    Sylvain Guerber
    Daivid Fowler
    Laurent Mollard
    Christel Dieppedale
    Gwenael Le Rhun
    Antoine Hamelin
    Jonathan Faugier-Tovar
    Kim Abdoul-Carime
    Communications Engineering, 3 (1):
  • [19] Optimized optomechanical micro-cantilever array for uncooled infrared Imaging
    Dong Feng-Liang
    Zhang Qing-Chuan
    Chen Da-Peng
    Miao Zheng-Yu
    Xiong Zhi-Ming
    Guo Zhe-Ying
    Li Chao-Bo
    Jiao Bin-Bin
    Wu Xiao-Ping
    CHINESE PHYSICS LETTERS, 2007, 24 (12) : 3362 - 3364
  • [20] Study on the fabrication and releasing of sacrificial layer of micro-cantilever
    Liu, Liang
    Liu, Weiguo
    Liu, Huan
    EIGHTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS, 2013, 9068
12345