Experimental study of the effect of hydrodynamic coupling of micro-cantilever array on the dynamic response of micro-cantilever

被引：2

作者：

Lee, Jiunn-Horng ^{[2
,3
]}

Lau, Yung-Dong ^{[1
]}

Yao, Chih-Min ^{[3
]}

Fang, Weileun ^{[1
,2
]}

机构：

[1] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu, Taiwan

[2] Natl Tsing Hua Univ, Inst NanoEngn & MicroSyst, Hsinchu, Taiwan

[3] Natl Ctr High Performance Comp, Natl Appl Res Labs, Hsinchu, Taiwan

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2011年 / 165卷 / 01期

关键词：

Micro-cantilever array; Quality factor; Air damping; Hydrodynamic force; QUALITY FACTOR; MICROCANTILEVERS; RESONATORS; BIOSENSORS; SENSORS; FORCE; MEMS;

D O I：

10.1016/j.sna.2009.12.024

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This study experimentally investigates the effect of hydrodynamic coupling of a micro-cantilever array on the dynamic response of a micro-cantilever. The micro-cantilever array consists of three harmonically driven micro-cantilevers dynamically coupled through air flow. The right cantilever and left cantilever (auxiliary-cantilevers) adjacent to the middle cantilever (operating-cantilever) are exploited to generate hydrodynamic force to change the air damping of operating-cantilever. Thus, the quality factor of operating-cantilever can be controlled by changing the phase and magnitude of excitation force on auxiliary-cantilevers, and varying the gap between auxiliary-cantilevers and operating-cantilever. In the experiment, magnetic actuated micro-cantilever arrays were fabricated and characterized. Measurements show the variation of quality factor of operating-cantilever is from -39% to +27%. (c) 2009 Elsevier B.V. All rights reserved.

引用

页码：79 / 85

页数：7

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