A new method of strain determination in partially relaxed thin films

It is well known that classical Stoney's formula for radius of thin film bowing fails when thin film is dislocated. Thereby, a method of determination lattice parameters for each of heterostructure epilayers is needed when inelastic relaxation takes place. In this article, we have developed a method of determination lattice parameters of a heterostructure from radius curvature measurement data. Description of deformation when dislocations are nucleated is carefully analyzed. It is shown that in order to take into account nucleated dislocations in thin film an additional term responsible for increased volume of layers should be included in the analysis. The proposed method is based on the finite deformation elasticity and uses the finite element method and bowing radius measurement by the laser beam reflection method. As an example the nitride alloy heterostructure with GaN as a substrate is analyzed. The verification is performed using X-ray measurement of lattice parameters. A very good correspondence between numerically determined lattice parameters and XRD measurements data are observed. (c) 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.