On the suitability of DD and HD models for the simulation of nanometer double-gate MOSFETs

被引:55
作者
Granzner, R [1 ]
Polyakov, VM [1 ]
Schwierz, F [1 ]
Kittler, M [1 ]
Doll, T [1 ]
机构
[1] Tech Univ Ilmenau, Fachgebiet Festkorperelekt, D-98684 Ilmenau, Germany
关键词
scaled MOSFET; double-gate MOSFET; simulation; Monte Carlo; drift-diffusion;
D O I
10.1016/S1386-9477(03)00290-X
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The drain currents of nanometer double-gate MOSFETs with gate lengths in the range from 100 to 5 nm are calculated using a hierarchy of simulation approaches. By comparing Monte Carlo (MC), drift-diffusion (DD), and hydrodynamic (HD) simulation results the suitability of the DD and HD models for the investigation of the on- and subthreshold currents of nano-scaled MOSFETs is tested. Modifications of the velocity-field characteristics in the DD simulations are suggested to improve the accuracy of the DD model. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码:33 / 38
页数:6
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