A Squeeze-film Damping Model for the Circular Torsion Micro-resonators

In recent years, MEMS devices are widely used in many industries. The prediction of squeeze-film damping is very important for the research of high quality factor resonators. In the past, there have been many analytical models predicting the squeeze-film damping of the torsion micro-resonators. However, for the circular torsion micro-plate, the works over it is very rare. The only model presented by Xia et al[7] using the method of eigenfunction expansions. In this paper, The Bessel series solution is used to solve the Reynolds equation under the assumption of the incompressible gas of the gap, the pressure distribution of the gas between two micro-plates is obtained. Then the analytical expression for the damping constant of the device is derived. The result of the present model matches very well with the finite element method (FEM) solutions and the result of Xia's model, so the present models' accuracy is able to be validated.