Multi-Level Cell Properties of a Bilayer Cu2O/Al2O3 Resistive Switching Device

被引:24
作者
Deuermeier, Jonas [1 ,2 ]
Kiazadeh, Asal [1 ,2 ]
Klein, Andreas [3 ]
Martins, Rodrigo [1 ,2 ]
Fortunato, Elvira [1 ,2 ]
机构
[1] Univ Nova Lisboa, Fac Sci & Technol, Dept Mat Sci, i3N CENIMAT, Campus Caparica, P-2829516 Caparica, Portugal
[2] CEMOP UNINOVA, Campus Caparica, P-2829516 Caparica, Portugal
[3] Tech Univ Darmstadt, Dept Mat & Earth Sci, Otto Berndt Str 3, D-64287 Darmstadt, Germany
基金
欧盟地平线“2020”;
关键词
resistive switching memories; multi-level cell; copper oxide; grain boundaries; aluminum oxide; ELECTRICAL-CONDUCTIVITY;
D O I
10.3390/nano9020289
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Multi-level resistive switching characteristics of a Cu2O/Al2O3 bilayer device are presented. An oxidation state gradient in copper oxide induced by the fabrication process was found to play a dominant role in defining the multiple resistance states. The highly conductive grain boundaries of the copper oxide-an unusual property for an oxide semiconductor-are discussed for the first time regarding their role in the resistive switching mechanism.
引用
收藏
页数:10
相关论文
共 38 条
[1]   A Thermally Stable and High-Performance 90-nm Al2O3\Cu-Based 1T1R CBRAM Cell [J].
Belmonte, Attilio ;
Kim, Woosik ;
Chan, Boon Teik ;
Heylen, Nancy ;
Fantini, Andrea ;
Houssa, Michel ;
Jurczak, Malgorzata ;
Goux, Ludovic .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2013, 60 (11) :3690-3695
[2]  
Bersuker G., 2010, ESSDERC 2010 - 40th European Solid State Device Research Conference, P333, DOI 10.1109/ESSDERC.2010.5618225
[3]   THE COPPER OXIDE RECTIFIER [J].
BRATTAIN, WH .
REVIEWS OF MODERN PHYSICS, 1951, 23 (03) :203-212
[4]   High Temperature Thermal Conductivity of Amorphous Al2O3 Thin Films Grown by Low Temperature ALD [J].
Cappella, Andrea ;
Battaglia, Jean-Luc ;
Schick, Vincent ;
Kusiak, Andrzej ;
Lamperti, Alessio ;
Wiemer, Claudia ;
Hay, Bruno .
ADVANCED ENGINEERING MATERIALS, 2013, 15 (11) :1046-1050
[5]   UV-Mediated Photochemical Treatment for Low-Temperature Oxide-Based Thin-Film Transistors [J].
Carlos, Emanuel ;
Branquinho, Rita ;
Kiazadeh, Asal ;
Barquinha, Pedro ;
Martins, Rodrigo ;
Fortunato, Elvira .
ACS APPLIED MATERIALS & INTERFACES, 2016, 8 (45) :31100-31108
[6]   Three-Dimensional Observation of the Conductive Filament in Nanoscaled Resistive Memory Devices [J].
Celano, Umberto ;
Goux, Ludovic ;
Belmonte, Attilio ;
Opsomer, Karl ;
Franquet, Alexis ;
Schulze, Andreas ;
Detavernier, Christophe ;
Richard, Olivier ;
Bender, Hugo ;
Jurczak, Malgorzata ;
Vandervorst, Wilfried .
NANO LETTERS, 2014, 14 (05) :2401-2406
[8]   Visualization of nanocrystalline CuO in the grain boundaries of Cu2O thin films and effect on band bending and film resistivity [J].
Deuermeier, Jonas ;
Liu, Hongjun ;
Rapenne, Laetitia ;
Calmeiro, Tomas ;
Renou, Gilles ;
Martins, Rodrigo ;
Munoz-Rojas, David ;
Fortunato, Elvira .
APL MATERIALS, 2018, 6 (09)
[9]   Highly conductive grain boundaries in copper oxide thin films [J].
Deuermeier, Jonas ;
Wardenga, Hans F. ;
Morasch, Jan ;
Siol, Sebastian ;
Nandy, Suman ;
Calmeiro, Tomas ;
Martins, Rodrigo ;
Klein, Andreas ;
Fortunato, Elvira .
JOURNAL OF APPLIED PHYSICS, 2016, 119 (23)
[10]   Substrate reactivity as the origin of Fermi level pinning at the Cu2O/ALD-Al2O3 interface [J].
Deuermeier, Jonas ;
Bayer, Thorsten J. M. ;
Yanagi, Hiroshi ;
Kiazadeh, Asal ;
Martins, Rodrigo ;
Klein, Andreas ;
Fortunato, Elvira .
MATERIALS RESEARCH EXPRESS, 2016, 3 (04)