Properties of light-emitting porous silicon formed by stain etching in HF/KIO3 solution under light illumination

被引:9
作者
Xu, Yan Kai [1 ]
Adachi, Sadao [1 ]
机构
[1] Gunma Univ, Grad Sch Engn, Gunma 3768515, Japan
关键词
D O I
10.1063/1.2924423
中图分类号
O59 [应用物理学];
学科分类号
摘要
The structural and optical properties of stain-etched porous silicon are investigated using optical microscopy, scanning electron microscopy, ex situ atomic force microscopy (AFM), photoluminescence (PL), and Fourier transform infrared (FTIR) spectroscopy. The stained layers were formed in a 50% HF solution with the addition of an oxidizing agent of KIO(3) on n-type silicon substrates with and without light illumination of lambda=532 nm. Strong yellowish emission is observed only when porous silicon is formed under light illumination and in the limited KIO(3) concentrations. Surprisingly enough, no PL emission is observed on stained surfaces formed without light illumination. The surface morphology as characterized by AFM reveals that light illumination can produce microscopic roughnesses on the stained surfaces. No specific chemical species on the stained surfaces can be identified by FTIR spectroscopy. The origin of the yellowish luminescence is hypothesized to be due to the quantum-size effect that enables the nondirect optical transitions via a momentum conservation relaxation. (C) 2008 American Institute of Physics.
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页数:6
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共 27 条
[1]   Model dielectric function for amorphous semiconductors [J].
Adachi, S ;
Mori, H ;
Ozaki, S .
PHYSICAL REVIEW B, 2002, 66 (15) :1-4
[2]   Spectroscopic investigation of light-emitting porous silicon photoetched in aqueous HF/I2 solution [J].
Adachi, Sadao ;
Oi, Mitsuru .
JOURNAL OF APPLIED PHYSICS, 2007, 102 (06)
[3]   Light emission from porous silicon photoetched in aqueous alkali salt solutions [J].
Adachi, Sadao ;
Miyazaki, Takayuki ;
Inoue, Kazufumi ;
Sodezawa, Shingo .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (7A) :4028-4034
[4]   Light-emitting porous silicon synthesized by photoetching in aqueous HF/I2 solution [J].
Adachi, Sadao ;
Kubota, Tomoo .
ELECTROCHEMICAL AND SOLID STATE LETTERS, 2007, 10 (02) :H39-H42
[5]   SILICON QUANTUM WIRE ARRAY FABRICATION BY ELECTROCHEMICAL AND CHEMICAL DISSOLUTION OF WAFERS [J].
CANHAM, LT .
APPLIED PHYSICS LETTERS, 1990, 57 (10) :1046-1048
[6]   The structural and luminescence properties of porous silicon [J].
Cullis, AG ;
Canham, LT ;
Calcott, PDJ .
JOURNAL OF APPLIED PHYSICS, 1997, 82 (03) :909-965
[7]   VISIBLE LUMINESCENCE FROM SILICON-WAFERS SUBJECTED TO STAIN ETCHES [J].
FATHAUER, RW ;
GEORGE, T ;
KSENDZOV, A ;
VASQUEZ, RP .
APPLIED PHYSICS LETTERS, 1992, 60 (08) :995-997
[8]   Stain etching characteristics of silicon(001) surfaces in aqueous HF/K2Cr2O7 solutions [J].
Hoshino, Daisuke ;
Adachi, Sadao .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2007, 154 (10) :E139-E144
[9]   Photoluminescence from photochemically etched silicon [J].
Marotti, RE ;
Quagliata, E ;
Dalchiele, EA .
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2003, 76 (03) :263-279
[10]   LUMINESCENT POROUS SILICON SYNTHESIZED BY VISIBLE-LIGHT IRRADIATION [J].
NOGUCHI, N ;
SUEMUNE, I .
APPLIED PHYSICS LETTERS, 1993, 62 (12) :1429-1431