Improvement of electrical characteristics in regrown AlGaN/GaN MOSFETs by suppression of the residual interface charge

In this paper, the influence of a regrown interface on the electrical properties of AlGaN/GaN heterostructure was investigated for recessed-gate MOSFETs fabricated by selective area regrowth. The electron mobility of the two-dimensional electron gas (2DEG) on regrown AlGaN/GaN structures was degraded when the 2DEG was near the regrown interface. The regrown interface had high carrier concentrations and Si impurities that caused degradation of the electron mobility of the 2DEG. Unintentional carrier generation at the regrown interface was eliminated by ultraviolet (UV) treatment before regrowth. A regrown AlGaN/GaN MOSFET device was then fabricated using the UV treatment. The device exhibited good performance such as normally-off operation without hysteresis or leaks. Improvement of the electrical characteristics of AlGaN/GaN MOSFETs was thus achieved by suppression of regrown interface charge.