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- [1] NON-SPHERICAL SU-8 MICROLENS ARRAY FABRICATED UTILIZING A NOVEL STAMPING PROCESS AND AN ELECTRO-STATIC PULLING METHOD IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009), 2009, : 987 - 990
- [2] Femtosecond optical curing of SU-8 photoresist ADVANCED FABRICATION TECHNOLOGIES FOR MICRO/NANO OPTICS AND PHOTONICS XIII, 2020, 11292
- [3] Process optimization of optical lithography of SU-8 photoresist Zhongguo Jixie Gongcheng/China Mechanical Engineering, 2005, 16 (SUPPL.): : 437 - 440
- [5] Fabrication of the Superhydrophobic Surface Using SU-8 Photoresist with Black Silicon PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2011, VOL 11, 2012, : 407 - 410
- [6] Use of SU-8 negative photoresist for optical mask manufacturing ADVANCES IN RESIST TECHNOLOGY AND PROCESSING XVII, PTS 1 AND 2, 2000, 3999 : 1215 - 1225
- [7] Novel method to fabricate lensed optical fiber with SU-8 photoresist for efficient coupling to high-power laser diodes MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, : 411 - 414
- [8] Fabrication of an array of microcavities utilizing SU-8 photoresist as an alternative `LIGA' technology Biennial University/Government/Industry Microelectronics Symposium - Proceedings, 1999, : 139 - 141