Integral nanoindentation evaluation of TiO2, SnO2, and ZnO thin films deposited via spray-pyrolysis on glass substrates

被引：14

作者：

Villegas, Edgar A. ^{[1
]}

Parra, Rodrigo ^{[1
]}

Ramajo, Leandro ^{[1
]}

机构：

[1] Natl Univ Mar del Plata, CONICET, Inst Res Mat Sci & Technol INTEMA, Ave Cristobal Colon 10850,B7606BWV, Mar Del Plata, Buenos Aires, Argentina

来源：

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS | 2019年 / 30卷 / 02期

关键词：

MECHANICAL-PROPERTIES; ELASTIC-MODULUS; OXIDE FILMS; HARDNESS; INDENTATION; COATINGS; BEHAVIOR; SURFACE; MOCVD; SIO2;

D O I：

10.1007/s10854-018-0404-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Tin, titanium and zinc oxide thin films were deposited on glass substrates by spray-pyrolysis. According to the resolution of XRD and SEM, films are single phase and of uniform surfaces. Elastic modulus and film hardness were studied by instrumented indentation. Friction coefficient and wear volume were determined by nanowear procedures. Low friction coefficient and roughness (<0.2 and approximate to 7nm, respectively) were measured. Hardness values (between 6 and 11GPa) were determined to be in agreement with those reported for similar films grown by physical methods. Titanium and tin dioxide films displayed better wear and mechanical properties than ZnO films.

引用

页码：1360 / 1365

页数：6

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