Impregnated Dispenser Cathode Auger Spectroscopy

In this paper an experimental apparatus for impregnated dispenser cathode Auger spectroscopy is described. The apparatus consists of three ultra-high vacuum chambers, all connected by 6 inches gate valves. In the first vacuum chamber the cathode under test was assembled and there are some vacuum windows with electric feedthrough to bias to the cathode heater and anode. The temperature cathode surface can be measured through a quartz window using a disappearing filament pyrometer. There is a translator to move the cathode from the first chamber to the second chamber where there are an Auger electron analyzer, an electron gun and an ion gun. The final chamber is a high vacuum reservoir responsible to maintain the vacuum pressure as low as 10(-10) torr.