Metrology of a mirror at the Advanced Photon Source: comparison between optical and x-ray measurements

被引:2
作者
Assoufid, L [1 ]
Lang, J [1 ]
Wang, J [1 ]
Srajer, G [1 ]
机构
[1] Argonne Natl Lab, Adv Photon Source, Argonne, IL 60439 USA
来源
ADVANCES IN MIRROR TECHNOLOGY FOR SYNCHROTRON X-RAY AND LASER APPLICATIONS | 1998年 / 3447卷
关键词
long trace profiler; metrology; x-ray mirror; synchrotron radiation;
D O I
10.1117/12.331123
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
This paper describes metrology of a vertically focusing mirror on the bending magnet beamline in sector-1 of the Advanced Photon Source, Argonne National Laboratory. The mirror was evaluated using measurements from both an optical long trace profiler and x-rays. Slope error profiles obtained with the two methods were compared and were found to be in a good agreement. Further comparisons were made between x-ray measurements and results from the SHADOW ray-tracing code.
引用
收藏
页码:109 / 116
页数:8
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