First Performance Evaluation of an X-Ray SOI Pixel Sensor for Imaging Spectroscopy and Intra-Pixel Trigger

被引：39

作者：

Ryu, Syukyo Gando ^{[1
]}

Tsuru, Takeshi Go ^{[1
]}

Nakashima, Shinya ^{[1
]}

Takeda, Ayaki ^{[2
,3
]}

Arai, Yasuo ^{[2
]}

Miyoshi, Toshinobu ^{[2
]}

Ichimiya, Ryo ^{[2
]}

Ikemoto, Yukiko ^{[2
]}

Matsumoto, Hironori ^{[4
]}

Imamura, Toshifumi ^{[5
]}

Ohmoto, Takafumi ^{[5
]}

Iwata, Atsushi ^{[5
]}

机构：

[1] Kyoto Univ, Grad Sch Sci, Dept Phys, Sakyo Ku, Kyoto 6068502, Japan

[2] High Energy Accelerator Res Org, Inst Particle & Nucl Studies, KEK, Tsukuba, Ibaraki 3050801, Japan

[3] Grad Univ Adv Studies SOKENDAI, Sch High Energy Accelerator Sci, Tsukuba, Ibaraki 3050801, Japan

[4] Nagoya Univ, Ctr Expt Studies, Kobayashi Maskawa Inst Origin Particles & Univ, Chikusa Ku, Nagoya, Aichi 4648602, Japan

[5] AR Tec Corp, Hiroshima 7390005, Japan

来源：

IEEE TRANSACTIONS ON NUCLEAR SCIENCE | 2011年 / 58卷 / 05期

基金：

日本学术振兴会;

关键词：

Active pixel sensor (APS); correlated double sampling (CDS); depletion depth; intra-pixel trigger; readout noise; Silicon-On-Insulator (SOI); X-ray; DETECTOR;

D O I：

10.1109/TNS.2011.2160970

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have been developing a monolithic active pixel sensor with the 0.2 mu m Silicon-On-Insulator (SOI) CMOS technology, called SOIPIX, for the wide-band X-ray imaging spectroscopy on future astronomical satellites. SOIPIX includes a thin CMOS-readout-array layer and a thick high-resistivity Si-sensor layer stacked vertically on a single chip. This arrangement allows for fast and intelligent readout circuitries on-chip, providing advantages over the charge-coupled device (CCD). We have designed and built a new SOIPIX prototype XRPIX1 for X-ray detection. XRPIX1 implements a correlated double sampling (CDS) readout circuit in each pixel to suppress the reset noise. We obtained an energy resolution of full width at half maximum of 1.2 keV (5.4%) at 22 keV with a chip having a 147 mu m sensor depletion at a back bias of 100 V cooled to -50 degrees C. Moreover, XRPIX1 offers intra-pixel hit trigger (timing) and two-dimensional hit-pattern (position) outputs. We also confirmed the trigger capability by irradiating a single pixel with laser light.

引用

页码：2528 / 2536

页数：9

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