The annealing effect on structural and optical properties of ZnO thin films produced by r.f. sputtering

被引：14
作者：
Rolo, A. G. [1 ]
de Campos, J. Ayres [1 ]
Viseu, T. [1 ]
de Lacerda-Aroso, T. [1 ]
Cerqueira, M. F. [1 ]
机构：
[1] Univ Minho, Dept Fis, P-4710057 Braga, Portugal
来源：
SUPERLATTICES AND MICROSTRUCTURES | 2007年 / 42卷 / 1-6期
关键词：
ZnO; thin films; X-ray; Raman; stress;
D O I：
10.1016/j.spmi.2007.04.069
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
In this work, a study of the structure and optical properties of undoped ZnO thin films produced by r.f. magnetron sputtering technique as a function of the growth parameters is reported. Modification under annealing conditions is also analysed. Raman spectroscopy, X-ray photoelectron spectroscopy, X-ray diffraction and optical transmittance have been used. From the position of the (002) X-ray diffraction peak and the E-2 (high) mode detected in Raman spectra, the residual stress both in the as-grown and in the annealed samples has been estimated. (c) 2007 Elsevier Ltd. All rights reserved.
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页码：265 / 269
页数：5
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