The annealing effect on structural and optical properties of ZnO thin films produced by r.f. sputtering

被引：14

作者：

Rolo, A. G. ^{[1
]}

de Campos, J. Ayres ^{[1
]}

Viseu, T. ^{[1
]}

de Lacerda-Aroso, T. ^{[1
]}

Cerqueira, M. F. ^{[1
]}

机构：

[1] Univ Minho, Dept Fis, P-4710057 Braga, Portugal

来源：

SUPERLATTICES AND MICROSTRUCTURES | 2007年 / 42卷 / 1-6期

关键词：

ZnO; thin films; X-ray; Raman; stress;

D O I：

10.1016/j.spmi.2007.04.069

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

In this work, a study of the structure and optical properties of undoped ZnO thin films produced by r.f. magnetron sputtering technique as a function of the growth parameters is reported. Modification under annealing conditions is also analysed. Raman spectroscopy, X-ray photoelectron spectroscopy, X-ray diffraction and optical transmittance have been used. From the position of the (002) X-ray diffraction peak and the E-2 (high) mode detected in Raman spectra, the residual stress both in the as-grown and in the annealed samples has been estimated. (c) 2007 Elsevier Ltd. All rights reserved.

引用

页码：265 / 269

页数：5

共 12 条

[1] RAMAN-STUDY OF THE PHONON HALFWIDTHS AND THE PHONON PLASMON COUPLING IN ZNO [J].