n-Type carbon nanotube field-effect transistors fabricated by using Ca contact electrodes -: art. no. 073105

被引:140
作者
Nosho, Y
Ohno, Y
Kishimoto, S
Mizutani, T
机构
[1] Nagoya Univ, Dept Quantum Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan
[2] Japan Sci & Technol Agcy, PRESTO, Kawaguchi, Saitama 3320012, Japan
关键词
D O I
10.1063/1.1865343
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have fabricated n-type carbon nanotube field effect transistors by choosing the contact metal. Single-walled carbon nanotubes were grown directly on a SiO2/Si substrate by chemical vapor deposition using patterned metal catalysts. Following the nanotube growth, Ca contacts with a small work function were formed by evaporating and lifting off the metal. The devices showed n-type transfer characteristics without any doping into the nanotube channel. In contrast, the devices with Pd contacts showed p-type conduction. These results can be explained by taking into account the work functions of the contact metals. (C) 2005 American Institute of Physics.
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页码:1 / 3
页数:3
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