Nanocrystalline diamond-based field-effect capacitive pH sensor

被引:0
作者
Christiaens, P. [1 ]
Abouzar, M. H. [3 ,4 ]
Poghossian, A. [3 ,4 ]
Wagner, T. [3 ]
Bijnens, N. [1 ]
Williams, O. A. [1 ]
Daenen, M. [1 ]
Haenen, K. [1 ,2 ]
Schoening, M. J. [3 ,4 ]
Wagner, P. [1 ]
机构
[1] Hasselt Univ, Inst Mat Res, Diepenbeek, Belgium
[2] IMEC VZW, Div IMOMEC, Leuven, Belgium
[3] Aachen Univ Appl Sci, Inst Nano & Biotechnol, Julich, Germany
[4] Inst Bio & Nanosyst, Res Ctr julich GmbH, Julich, Germany
来源
TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2007年
关键词
nanocrystalline diamond; field-effect; pH sensor;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The pH-sensitive properties of field-effect capacitive electrolyte-diamond-insulator-semiconductor (EDIS) sensors with undoped nanocrystalline diamond (NCD) thin films (100-500 nm) having hydrogen (H)- and oxygen (O)-terminated surfaces have been investigated. The NCD films were grown on P-Si-SiO2 substrates by a microwave plasma-enhanced chemical vapour deposition from a mixture of methane and hydrogen. The EDIS sensors have been characterised by means of capacitance-voltage spectroscopy, constant-capacitance and impedance-spectroscopy method. The developed EDIS sensors with O-terminated and H-terminated NCD surfaces show an average pH sensitivity of 38 mV/pH and 34-36 mV/pH, respectively. A possible mechanism of the pH sensitivity is discussed.
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页数:2
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