Nanocrystalline diamond-based field-effect capacitive pH sensor

被引：0

作者：

Christiaens, P. ^{[1
]}

Abouzar, M. H. ^{[3
,4
]}

Poghossian, A. ^{[3
,4
]}

Wagner, T. ^{[3
]}

Bijnens, N. ^{[1
]}

Williams, O. A. ^{[1
]}

Daenen, M. ^{[1
]}

Haenen, K. ^{[1
,2
]}

Schoening, M. J. ^{[3
,4
]}

Wagner, P. ^{[1
]}

机构：

[1] Hasselt Univ, Inst Mat Res, Diepenbeek, Belgium

[2] IMEC VZW, Div IMOMEC, Leuven, Belgium

[3] Aachen Univ Appl Sci, Inst Nano & Biotechnol, Julich, Germany

[4] Inst Bio & Nanosyst, Res Ctr julich GmbH, Julich, Germany

来源：

TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2007年

关键词：

nanocrystalline diamond; field-effect; pH sensor;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The pH-sensitive properties of field-effect capacitive electrolyte-diamond-insulator-semiconductor (EDIS) sensors with undoped nanocrystalline diamond (NCD) thin films (100-500 nm) having hydrogen (H)- and oxygen (O)-terminated surfaces have been investigated. The NCD films were grown on P-Si-SiO2 substrates by a microwave plasma-enhanced chemical vapour deposition from a mixture of methane and hydrogen. The EDIS sensors have been characterised by means of capacitance-voltage spectroscopy, constant-capacitance and impedance-spectroscopy method. The developed EDIS sensors with O-terminated and H-terminated NCD surfaces show an average pH sensitivity of 38 mV/pH and 34-36 mV/pH, respectively. A possible mechanism of the pH sensitivity is discussed.

引用

页数：2

共 10 条

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