Synthesizing SnO2 thin films and characterizing sensing performances

被引：42

作者：

Ohgaki, Takeshi ^{[1
]}

Matsuoka, Ryota ^{[2
]}

Watanabe, Ken

Matsumoto, Kenji ^{[2
]}

Adachi, Yutaka

Sakaguchi, Isao

Hishita, Shunichi

Ohashi, Naoki ^{[2
]}

Haneda, Hajime ^{[2
]}

机构：

[1] Natl Inst Mat Sci, Sensor Mat Ctr, Tsukuba, Ibaraki 3050044, Japan

[2] Kyushu Univ, Dept Appl Sci Elect & Mat, Fukuoka 8168580, Japan

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2010年 / 150卷 / 01期

基金：

日本学术振兴会;

关键词：

SnO(2); Gas sensor; Thin film; Pulsed laser deposition; Electric property; GAS SENSOR; MECHANISM; TEMPERATURE; SENSITIVITY; DEPOSITION; THICKNESS; BILAYER; HEATER; H-2;

D O I：

10.1016/j.snb.2010.07.036

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

SnO(2) thin films were grown on silica glass substrates using the pulsed laser deposition (PLD) method, and their structures, electric properties, and sensor performances were examined to investigate the sensing mechanism of thin-film gas sensors. Single-phase SnO(2) films with rutile-type structures were obtained at 650 degrees C. All the SnO(2) films had many columnar grains, and the grain size increased with film thickness Measurements of the Hall coefficient at room temperature revealed that the Hall mobility of the films was independent of the film thickness. In contrast, the sensing performances of the films for NO(2) and H(2) gases respectively in an air atmosphere drastically improved for film thicknesses under 100 nm These results for the film properties and sensing performances of SnO(2) thin films are discussed in terms of a space-charge layer formed on the columnar grains (C) 2010 Elsevier B V All rights reserved

引用

页码：99 / 104

页数：6

共 27 条

[1] The effects of thickness and operation temperature on ZnO:Al thin film CO gas sensor [J].

Chang, JF ;

Kuo, HH ;

Leu, IC ;

Hon, MH .

SENSORS AND ACTUATORS B-CHEMICAL, 2002, 84 (2-3) :258-264

[2] New gas sensing mechanism for SnO2 thin-film gas sensors fabricated by using dual ion beam sputtering [J].

Choe, YS .

SENSORS AND ACTUATORS B-CHEMICAL, 2001, 77 (1-2) :200-208

[3] Gas sensing properties of nanosized tin oxide synthesised by mechanochemical processing [J].

Cukrov, LM ;

McCormick, PG ;

Galatsis, K ;

Wlodarski, W .

SENSORS AND ACTUATORS B-CHEMICAL, 2001, 77 (1-2) :491-495

[4] Reactively sputtered titania films as high temperature carbon monoxide sensors [J].

Dutta, PK ;

Frank, M ;

Hunter, GW ;

George, M .

SENSORS AND ACTUATORS B-CHEMICAL, 2005, 106 (02) :810-815

[5] ELECTRICAL-PROPERTIES OF GRAIN-BOUNDARIES IN POLYCRYSTALLINE COMPOUND SEMICONDUCTORS [J].

GREUTER, F ;

BLATTER, G .

SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1990, 5 (02) :111-137

[6] Preparation of macroporous SnO2 films using PMMA microspheres and their sensing properties to NOx and H2 [J].

Hyodo, T ;

Sasahara, K ;

Shimizu, Y ;

Egashira, M .

SENSORS AND ACTUATORS B-CHEMICAL, 2005, 106 (02) :580-590

[7] STUDY ON THE SENSING MECHANISM OF TIN OXIDE FLAMMABLE-GAS SENSORS USING THE HALL-EFFECT [J].

IPPOMMATSU, M ;

OHNISHI, H ;

SASAKI, H ;

MATSUMOTO, T .

JOURNAL OF APPLIED PHYSICS, 1991, 69 (12) :8368-8374

[8] CHEMICAL VAPOR-DEPOSITION OF TRANSPARENT, ELECTRICALLY CONDUCTIVE TIN OXIDE-FILMS FORMED FROM DIBUTYL TIN DIACETATE [J].

KANE, J ;

SCHWEIZER, HP ;

KERN, W .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (08) :1144-1149

[9] A study on thin film gas sensor based on SnO2 prepared by pulsed laser deposition method [J].

Kim, CK ;

Choi, SM ;

Noh, IH ;

Lee, JH ;

Hong, C ;

Chae, HB ;

Jang, GE ;

Park, HD .

SENSORS AND ACTUATORS B-CHEMICAL, 2001, 77 (1-2) :463-467

[10]

Kim H. R., 2004, SENSOR ACTUAT B-CHEM, V136, P138

← 1 2 3 →