Performance evaluation of run-to-run control methods in semiconductor processes

被引：0

作者：

Zhang, C ^{[1
]}

Deng, H ^{[1
]}

Baras, JS ^{[1
]}

机构：

[1] Univ Maryland, Dept Elect & Comp Engn, College Pk, MD 20742 USA

来源：

CCA 2003: PROCEEDINGS OF 2003 IEEE CONFERENCE ON CONTROL APPLICATIONS, VOLS 1 AND 2 | 2003年

关键词：

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Run-to-Run (RtR) control plays an important role in semiconductor manufacturing processes. In this paper, RtR control methods are classified and evaluated. The set-valued RtR controllers with ellipsoid approximation are compared with two typical RtR controllers: the Exponentially Weighted Moving Average (EWMA) controller and the Optimizing Adaptive Quality Controller (OAQC) by simulations according to the following criteria: A good RtR controller should be able to compensate for various disturbances, such as small drifts, step disturbances and model errors; moreover, it should be able to deal with bounds, cost requirement and multiple targets that are often encountered in semiconductor processes. Based on our simulation results, suggestions on selection of a proper RtR controller for a semiconductor process are given as conclusions.

引用

页码：841 / 848

页数：8

共 18 条

[11]

NATALE CD, 1999, IEEE T SEMICONDUCTOR, V12

[12] A comparative analysis of run-to-run control algorithms in the semiconductor manufacturing industry [J].

Ning, Z ;

Moyne, JR ;

Smith, T ;

Boning, D ;

DelCastillo, E ;

Yeh, JY ;

Hurwitz, A .

1996 ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE AND WORKSHOP - ASMC 96 PROCEEDINGS: THEME - INNOVATIVE APPROACHES TO GROWTH IN THE SEMICONDUCTOR INDUSTRY, 1996, :375-381

[13] Control of photoresist properties: A kalman filter based approach [J].

Palmer, E ;

Ren, W ;

Spanos, CJ ;

Poolla, K .

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 1996, 9 (02) :208-214

[14] RUN BY RUN PROCESS-CONTROL - COMBINING SPC AND FEEDBACK-CONTROL [J].

SACHS, E ;

HU, A ;

INGOLFSSON, A .

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 1995, 8 (01) :26-43

[15] A self-tuning EWMA controller utilizing artificial neural network function approximation techniques [J].

Smith, T ;

Boning, D .

NINETEENTH IEEE/CPMT INTERNATIONAL ELECTRONICS MANUFACTURING TECHNOLOGY SYMPOSIUM - PROCEEDINGS, 1996 IEMT SYMPOSIUM, 1996, :355-363

[16]

WANG XA, 1996, IEEE T COMP PACK M C, V19

[17]

ZHANG C, 2000, P AEC APC 2000 LAK T, V3, P889

[18]

ZHANG C, 2000, P AEC APC 2000 LAK T, V1, P167

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