Performance evaluation of run-to-run control methods in semiconductor processes

被引：0

作者：

Zhang, C ^{[1
]}

Deng, H ^{[1
]}

Baras, JS ^{[1
]}

机构：

[1] Univ Maryland, Dept Elect & Comp Engn, College Pk, MD 20742 USA

来源：

CCA 2003: PROCEEDINGS OF 2003 IEEE CONFERENCE ON CONTROL APPLICATIONS, VOLS 1 AND 2 | 2003年

关键词：

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Run-to-Run (RtR) control plays an important role in semiconductor manufacturing processes. In this paper, RtR control methods are classified and evaluated. The set-valued RtR controllers with ellipsoid approximation are compared with two typical RtR controllers: the Exponentially Weighted Moving Average (EWMA) controller and the Optimizing Adaptive Quality Controller (OAQC) by simulations according to the following criteria: A good RtR controller should be able to compensate for various disturbances, such as small drifts, step disturbances and model errors; moreover, it should be able to deal with bounds, cost requirement and multiple targets that are often encountered in semiconductor processes. Based on our simulation results, suggestions on selection of a proper RtR controller for a semiconductor process are given as conclusions.

引用

页码：841 / 848

页数：8

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