Nanocomposite porous silicon layers

被引:0
|
作者
Kleps, Irina [1 ]
Miu, Mihaela [1 ]
Ignat, Teodora [1 ]
Simion, Monica [1 ]
机构
[1] Natl Inst Res & Dev Microtechnol IMT Bucharest, Bucharest, Romania
关键词
porous silicon; nanostructured silicon; nanocomposite layers; sensors; biomedical applications;
D O I
暂无
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
Porous silicon (PS) layers formed on the crystalline Si substrates by electrochemical etching have been known for many years, due to their unique optical properties. PS properties are strongly dependent upon size and shape, and are controlled by quantum size effects. Moreover, PS is a biocompatible material. The study of the porous silicon (PS) structures is important for both fundamental understanding of nano-systems as well for its potential applications. This paper is a review of our experimental works on PS based composite layers with the aim to enlarge their applications, especially in sensor and biomedical fields.
引用
收藏
页码:2916 / +
页数:2
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