The demonstration of significant ferroelectricity in epitaxial Y-doped HfO2 film

被引：213

作者：

Shimizu, Takao ^{[1
]}

Katayama, Kiliha ^{[2
]}

Kiguchi, Takanori ^{[3
]}

Akama, Akihiro ^{[3
]}

Konno, Toyohiko J. ^{[3
]}

Sakata, Osami ^{[4
]}

Funakubo, Hiroshi ^{[1
,2
,5
]}

机构：

[1] Tokyo Inst Technol, Mat Res Ctr Element Strategy, Midori Ku, 4259 Nagatsuta, Yokohama, Kanagawa 2268503, Japan

[2] Tokyo Inst Technol, Interdisciplinary Grad Sch Sci & Engn, Midori Ku, 4259 Nagatsuta, Yokohama, Kanagawa 2268502, Japan

[3] Tohoku Univ, Inst Mat Res, Aoba Ku, 2-1-1 Katahira, Sendai, Miyagi 9808577, Japan

[4] Natl Inst Mat Sci, Synchrotron X Ray Stn, SPring 8, 1-1-1 Koto, Sayo, Hyogo 6795148, Japan

[5] Tokyo Inst Technol, Sch Mat & Chem Technol, Midori Ku, 4259 Nagatsuta, Yokohama, Kanagawa 2268502, Japan

来源：

SCIENTIFIC REPORTS | 2016年 / 6卷

关键词：

OPTICAL-PROPERTIES; THIN-FILMS; POLARIZATION;

D O I：

10.1038/srep32931

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

Ferroelectricity and Curie temperature are demonstrated for epitaxial Y-doped HfO2 film grown on (110) yttrium oxide-stabilized zirconium oxide (YSZ) single crystal using Sn-doped In2O3 (ITO) as bottom electrodes. The XRD measurements for epitaxial film enabled us to investigate its detailed crystal structure including orientations of the film. The ferroelectricity was confirmed by electric displacement filed-electric filed hysteresis measurement, which revealed saturated polarization of 16 mu C/cm(2). Estimated spontaneous polarization based on the obtained saturation polarization and the crystal structure analysis was 45 mu C/cm(2). This value is the first experimental estimations of the spontaneous polarization and is in good agreement with the theoretical value from first principle calculation. Curie temperature was also estimated to be about 450 degrees C. This study strongly suggests that the HfO2-based materials are promising for various ferroelectric applications because of their comparable ferroelectric properties including polarization and Curie temperature to conventional ferroelectric materials together with the reported excellent scalability in thickness and compatibility with practical manufacturing processes.

引用

页数：8

共 33 条

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