Rapid annealing and cooling induced surface cleaning of semiconducting carbon nanotubes for high-performance thin-film transistors

被引:18
|
作者
Yao, Jian [1 ,2 ,3 ,4 ]
Li, Yijun [5 ]
Li, Yahui [1 ]
Sui, Qicheng [1 ]
Wen, Haijian [1 ,3 ]
Cao, Leitao [1 ]
Cao, Pei [1 ]
Kang, Lixing [1 ]
Tang, Jianshi [5 ,6 ]
Jin, Hehua [1 ]
Qiu, Song [1 ]
Li, Qingwen [1 ,2 ,3 ]
机构
[1] Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Div Adv Mat, Key Lab Multifunct & Smart Syst, Suzhou 215123, Peoples R China
[2] Chinese Acad Sci, Shanghai Adv Res Inst, Shanghai 201203, Peoples R China
[3] ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai 201210, Peoples R China
[4] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
[5] Tsinghua Univ, Beijing Innovat Ctr Future Chips ICFC, Inst Microelect, Beijing 100084, Peoples R China
[6] Tsinghua Univ, Beijing Innovat Ctr Future Chips ICFC, Beijing 100084, Peoples R China
基金
中国国家自然科学基金;
关键词
Single-walled carbon nanotube; Thin-film; Rapid annealing and cooling; CNT-TFTs; INTEGRATED-CIRCUITS; CONJUGATED POLYMERS; LOW-COST; DISPERSION; RELEASE; GRAPHENE; MOBILITY; ROBUST;
D O I
10.1016/j.carbon.2021.08.076
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Semiconducting single-walled carbon nanotube (s-SWCNT) films require high-quality preparation and optimization for use in carbon-based electronic devices. Tremendous progress has been made in sSWCNTs sorting technology with conjugated polymers to obtain high-purity s-SWCNT films. However, one drawback of this technology is residual polymer wrapping on s-SWCNT surfaces. These residual polymers have poor conductivity, impeding the charge transport between the nanotube-electrode and the nanotube-nanotube. To address this issue, a rapid annealing and cooling method was developed for cleaning the s-SWCNT films, which can thoroughly remove the wrapped polymers from the surfaces of sSWCNTs, effectively reducing the contact resistance between the nanotube-metal electrode and the nanotube-nanotube. Our results show that thin-film transistors made of cleaned s-SWCNTs exhibited improved performance when compared with pristine s-SWCNT films rinsed with an organic solvent. The contact resistance between the s-SWCNTs and the electrode was reduced by 700%, while the on-state current density of the CNT-TFTs increased by nearly 600%. These results thus demonstrated the effectiveness of our developed method for removing polymers from the surfaces of s-SWCNTs, which is essential for the further development of carbon nanotube electronic devices and circuits. (c) 2021 Elsevier Ltd. All rights reserved.
引用
收藏
页码:764 / 771
页数:8
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