The real and potential benefits of light trapping in microcrystalline silicon single-junction solar cells are studied theoretically. Effects of a hypothetical high haze parameter of textured transparent conductive oxide on quantum efficiency and short-circuit current of the solar cell are analysed by numerical simulation. The role of the angular distribution function of scattered light as a second important scattering parameter is shown. The potential thickness reductions of the intrinsic layer due to enhanced light trapping are demonstrated. Copyright (C) 2003 John Wiley Sons, Ltd.