Processing and characterization of piezoelectric thick films screen-printed on silicon and glass-ceramic substrates

Lead titanate modified with calcium (PT) and Pb(Zr(0.52) Ti (0.48) )O(3) (PZT) thick films (in the range 30-100 mum) have been screen-printed on various substrates: alumina, silicon, glass-ceramic and stainless steel. Different sintering aids including Li(2)CO(3)-Bi(2)O(3)-CuO and PbO-GeO(2)-SiO(2) have been tested on thick films and corresponding bulk ceramics. PT films on glass-ceramic and stainless steel substrates, previously electroded with Ag-Pd, have good properties close to the properties of the bulk ceramics: permittivity of 100-160 and d 33 of 40-55 pC/N values have been obtained. PZT films on Pt/Ti/SiO(2) /Si substrates having dielectric permittivity of 500 and piezoelectric constant d(33) of 150 pC/N with a high coupling factor value have been obtained with a good repeatability. The influence of different electrodes on the film properties and methods used for the characterization of such films clamped on substrates have been discussed.