Transport of a Low-Energy Ion Beam with Ballistic Focusing

被引:0
|
作者
Koval', T., V [1 ]
Tarakanov, V. P. [2 ,3 ]
机构
[1] Natl Res Tomsk Polytech Univ, Tomsk 634050, Russia
[2] Russian Acad Sci, Joint Inst High Temp, Moscow 125412, Russia
[3] Natl Res Nucl Univ MEPhI, Moscow 115409, Russia
基金
俄罗斯科学基金会;
关键词
ion beam; virtual anode; transport; ballistic focusing; PiC simulation; IMPLANTATION;
D O I
10.1134/S1063780X21080079
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Transport of an ion beam in a hemispherical equipotential drift space is studied by the PiC method. It is shown that the collector current transfers into a pulsed mode caused by the dynamic processes of the formation of a virtual anode and neutralization of its positive charge by plasma and secondary electrons at the energy of the injected ions of W <= W-c (W-c is the critical energy). The critical energy W-c = 2 keV for an ion current of I-b = 1 A at a gas density of n(g) = 10(13) cm(-3). The critical energy and the period of oscillation of the beam current at the collector depend on the ion energy, beam current, and gas density.
引用
收藏
页码:840 / 849
页数:10
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