Evaluating performance of thermally curled microcantilever RF MEMS switches

被引：5
|
作者：
Cheulkar, Laukik N. [1 ]
Sawant, Vishram B. [1 ]
Mohite, Suhas S. [2 ]
机构：
[1] Rajiv Gandhi Inst Technol, Mech Engn Dept, Mumbai 400053, Maharashtra, India
[2] Govt Coll Engn, Mech Engn Dept, Aurangabad 431005, Maharashtra, India
来源：
MATERIALS TODAY-PROCEEDINGS | 2020年 / 27卷
关键词：
MECHANICAL-PROPERTIES; CANTILEVER; DEFORMATION; STRESS; FILM;
D O I：
10.1016/j.matpr.2019.08.114
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：12 / 18
页数：7
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