Highly Integrated InGaN/GaN Semipolar Micro-Pyramid Light-Emitting Diode Arrays by Confined Selective Area Growth

被引:17
作者
Bae, Si-Young [1 ]
Kim, Do-Hyung [1 ]
Lee, Dong-Seon [1 ]
Lee, Seung-Jae [2 ]
Baek, Jong Hyeob [2 ]
机构
[1] Gwangju Inst Sci & Technol, Sch Informat & Commun, Kwangju 500712, South Korea
[2] Korea Photon Technol Inst, Kwangju 500779, South Korea
关键词
EPITAXIAL LATERAL OVERGROWTH; WELL STRUCTURES; GAN STRUCTURES; QUANTUM-WELLS; FABRICATION; STRAIN; SEMICONDUCTORS; LUMINESCENCE; EMISSION; SINGLE;
D O I
10.1149/2.018202esl
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
We report on the fabrication of highly integrated semipolar {10 (1) over bar1} GaN micro-pyramid light-emitting diode (LED) arrays on a c-plane sapphire substrate obtained via confined selective area growth (SAG). The cathodoluminescence (CL) revealed that the micro-pyramid arrays were under a severe local strain and potential fluctuations were observed depending on the location of the pyramid facets. The emissive region in the micro-pyramid facets was also found to be different in the monochromatically captured CL images. Furthermore, the electroluminescence (EL) of the micro-pyramid LED arrays had a palpable emissive spectra for high indium composition compared to c-plane LEDs, and optical polarization switching was also observed. (C) 2011 The Electrochemical Society. [DOI: 10.1149/2.018202esl] All rights reserved.
引用
收藏
页码:H47 / H50
页数:4
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