Ring-shaped Lamb Wave Resonator based LiNbO3 Film with A1/A3 Mode Resonance above 6/17 GHz

被引：1

作者：

Zhou, Jie ^{[1
]}

Liu, Jieyu ^{[1
]}

Xie, Ying ^{[1
]}

Xu, Qinwen ^{[1
]}

Wu, Zhongye ^{[1
]}

Cai, Yao ^{[1
]}

Sun, Chengliang ^{[1
]}

机构：

[1] Wuhan Univ, Inst Technol Sci, Wuhan, Peoples R China

来源：

INTERNATIONAL ULTRASONICS SYMPOSIUM (IEEE IUS 2021) | 2021年

基金：

中国国家自然科学基金; 国家重点研发计划;

关键词：

Lamb Wave Resonator; High Frequency; Lithium Niobate Membrane; Electromechanical Coupling Coefficient; Spurious Modes Suppression; RF Filters;

D O I：

10.1109/IUS52206.2021.9593844

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

This paper presents a ring-shaped Lamb wave resonator based 300 nm-thick Z-cut LiNbO3 thin film The proposed structure applied the alternative voltage along both the x and y direction by arranging ring-shaped electrodes, thus exciting the two-dimensional Lamb waves by utilizing both the e(24) and e(15) piezoelectric constants. The measured impedance results show first order asymmetric mode (A(1)) mode resonance above 6 GHz with effective electromechanical coupling coefficient (K-eff(2) ) of 8.91%, and third order asymmetric mode (A(3)) mode resonance above 17 GHz with K-eff(2) of 1.77%. In the meanwhile, the proposed structure realized a static capacitance (C-0) of 0.13 pF within an active region area at 200x200 mu m(2), which has great potential for 50 Omega impedance match within a miniature size applied in super high frequency, spurious modes free RF front-ends filters.

引用

页数：3

共 8 条

[1]

Bousquet M, 2020, IEEE INT ULTRA SYM

[2]

Khine L., 2011, TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, P526, DOI 10.1109/TRANSDUCERS.2011.5969674

[3]

Moe C, 2020, IEEE INT ULTRA SYM, DOI 10.1109/IUS46767.2020.9251412

[4] 5 GHz laterally-excited bulk-wave resonators (XBARs) based on thin platelets of lithium niobate [J].