Deep UV nano-microstructuring of substrates for surface plasmon resonance imaging

被引：29

作者：

Dhawan, A. ^{[1
,2
]}

Duval, A. ^{[3
]}

Nakkach, M. ^{[3
]}

Barbillon, G. ^{[3
]}

Moreau, J. ^{[3
]}

Canva, M. ^{[3
]}

Vo-Dinh, T. ^{[1
,2
,4
]}

机构：

[1] Duke Univ, Fitzpatrick Inst Photon, Durham, NC 27708 USA

[2] Duke Univ, Dept Biomed Engn, Durham, NC 27708 USA

[3] Univ Paris 11, CNRS, Lab Charles Fabry, Inst Opt Grad Sch, F-91127 Palaiseau, France

[4] Duke Univ, Dept Chem, Durham, NC 27708 USA

来源：

NANOTECHNOLOGY | 2011年 / 22卷 / 16期

基金：

美国国家卫生研究院;

关键词：

ENHANCED RAMAN-SCATTERING; SENSORS; SPECTROSCOPY;

D O I：

10.1088/0957-4484/22/16/165301

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In this paper, we describe wafer-scale fabrication and characterization of plasmonic chips-containing different sizes and spacings of metallic micro-and nanoline structures-using deep UV lithography. Using a high dose (25 mJ cm(-2)) and a proper lift-off process, feature sizes as small as 25 nm are obtained. Moreover, we study the dependence of surface plasmon resonance on the angle of incidence and wavelength for different micro-and nanoline size and spacing values, yielding localized to quasi-propagative plasmonic behaviors. Rigorous coupled wave analysis (RCWA) techniques are employed to numerically confirm these experimental observations. Finally, the refractive index of media around the SPRI sensor chips is varied, showing the angulo-spectral regions of higher sensitivity for each type of structure.

引用

页数：8

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